Interferometric-displacement readout of cantilever sensors

M. Ghaderi; I. Sabri; M. Taghavi; F. Beygi Azar Aghbolagh; H. Latifi

doi:10.1117/12.922050

4 May 2012 Interferometric-displacement readout of cantilever sensors

M. Ghaderi, I. Sabri, M. Taghavi, F. Beygi Azar Aghbolagh, H. Latifi

Proceedings Volume 8430, Optical Micro- and Nanometrology IV; 84301J (2012) https://doi.org/10.1117/12.922050
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

In this paper we have explained a new method for measuring the cantilever displacement using both reflective and interferometric properties of the cantilever. In our method, a Laser light is shone on the cantilever, and the reflected pattern is monitored by a commercially available CCD. Due to the micrometer dimensions of the cantilever which was smaller than the spot size of the laser, the laser beam would be reflected by both substrate and the cantilever's surface, and this will produce an interference pattern on the screen. In this configuration, a displacement in the cantilever will reflect the light in a different angle and also changes the optical path difference between the reflected light from the cantilever and substrate. The overall result of these two effects would be a total displacement of the pattern, which could be simply measured using a CCD. Finally, by taking both effects into consideration,, the cantilever's displacement could be measured. For testing this technique different cantilevers were fabricated and were electrostatically actuated. In this method, displacements as small as 10nm were possible to measure.

Citation Download Citation

M. Ghaderi, I. Sabri, M. Taghavi, F. Beygi Azar Aghbolagh, and H. Latifi "Interferometric-displacement readout of cantilever sensors", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84301J (4 May 2012); https://doi.org/10.1117/12.922050

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