Using MountainsMap (Digital Surf) surface analysis software as an analysis tool for x-ray mirror optical metrology data

Alan Duffy; Brian Yates; Peter Takacs

doi:10.1117/12.931646

15 October 2012 Using MountainsMap (Digital Surf) surface analysis software as an analysis tool for x-ray mirror optical metrology data

Alan Duffy, Brian Yates, Peter Takacs

Author Affiliations +

Proceedings Volume 8501, Advances in Metrology for X-Ray and EUV Optics IV; 850106 (2012) https://doi.org/10.1117/12.931646
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

The Optical Metrology Facility at the Canadian Light Source (CLS) has recently purchased MountainsMap surface analysis software from Digital Surf and we report here our experiences with this package and its usefulness as a tool for examining metrology data of synchrotron x-ray mirrors. The package has a number of operators that are useful for determining surface roughness and slope error including compliance with ISO standards (viz. ISO 4287 and ISO 25178). The software is extensible with MATLAB scripts either by loading an m-file or by a user written script. This makes it possible to apply a custom operator to measurement data sets. Using this feature we have applied the simple six-line MATLAB code for the direct least square fitting of ellipses developed by Fitzgibbon et. al. to investigate the residual slope error of elliptical mirrors upon the removal of the best-fit-ellipse. The software includes support for many instruments (e.g. Zygo, MicroMap, etc...) and can import ASCII data (e.g. LTP data). The stitching module allows the user to assemble overlapping images and we report on our experiences with this feature applied to MicroMap surface roughness data. The power spectral density function was determined for the stitched and unstitched data and compared.

Citation Download Citation

Alan Duffy, Brian Yates, and Peter Takacs "Using MountainsMap (Digital Surf) surface analysis software as an analysis tool for x-ray mirror optical metrology data", Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 850106 (15 October 2012); https://doi.org/10.1117/12.931646

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