Optical interrogation of a pressure sensor fabricated using MEMS technology

Bhawna Dhingra; K. Thyagarajan; Sudhir Chandra; Ruchi Tiwari

doi:10.1117/12.927410

15 October 2012 Optical interrogation of a pressure sensor fabricated using MEMS technology

Bhawna Dhingra, K. Thyagarajan, Sudhir Chandra, Ruchi Tiwari

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 854913 (2012) https://doi.org/10.1117/12.927410
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

An optical MEMS (micro-electromechanical system) pressure sensor fabricated using bulk silicon micromachining techniques and tested using single wavelength interrogation technique is presented here. The sensor described here was designed for low pressure range applications. The operating principle of the sensor is Fabry-Perot (FP) interference. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, low hysteresis and a very good repeatability. Sensor’s response was found to be comparable with the theoretical predictions[3].

Citation Download Citation

Bhawna Dhingra, K. Thyagarajan, Sudhir Chandra, and Ruchi Tiwari "Optical interrogation of a pressure sensor fabricated using MEMS technology", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854913 (15 October 2012); https://doi.org/10.1117/12.927410

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