Phase shift reflectometry for sub-surface defect detection

Anand Asundi; Huang Lei; Teoh Kang Min Eden; Parthasarathy Sreemathy; Watt Sook May

doi:10.1117/12.1000032

6 December 2012 Phase shift reflectometry for sub-surface defect detection

Anand Asundi, Huang Lei, Teoh Kang Min Eden, Parthasarathy Sreemathy, Watt Sook May

Proceedings Volume 8563, Optical Metrology and Inspection for Industrial Applications II; 85630G (2012) https://doi.org/10.1117/12.1000032
Event: Photonics Asia, 2012, Beijing, China

Abstract

Phase Shift Reflectometry has recently been seen as a novel alternative to interferometry since it can provide warpage measurement over large areas with no need for large optical components. To confirm its capability and to explore the use of this method for sub-surface defect detection, a Chinese magic mirror is used. This bronze mirror which dates back to the Chinese Han Dynasty appears at first sight to be an ordinary convex mirror. However, unlike a normal mirror, when illuminated by a beam of light, an image is formed onto a screen. It has been hypothesized that there are indentations inside the mirror which alter the path of reflected light rays and hence the reflected image. This paper explores various methods to measure these indentations. Of the methods test Phase Shift Reflectometry (PSR) was found suitable to be the most suitable both in terms of the sensitivity and the field of view.

Citation Download Citation

Anand Asundi, Huang Lei, Teoh Kang Min Eden, Parthasarathy Sreemathy, and Watt Sook May "Phase shift reflectometry for sub-surface defect detection", Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 85630G (6 December 2012); https://doi.org/10.1117/12.1000032

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