System LSM - 87 For The Laser Micromachining Investigation

Marian Nowicki; Zygmunt Niechoda

doi:10.1117/12.943373

19 October 1987 System LSM - 87 For The Laser Micromachining Investigation

Marian Nowicki, Zygmunt Niechoda

Proceedings Volume 0859, Laser Technology II; (1987) https://doi.org/10.1117/12.943373
Event: Second Symposium on Laser Technology, 1987, Warsaw, Poland

Abstract

A versatile system LSM - 87 have been developed for the investigation of laser micromachining. The system can operate with many types of lasers. Laser trimming of piezoelectric filters is an example of practical application of this system.

Citation Download Citation

Marian Nowicki and Zygmunt Niechoda "System LSM - 87 For The Laser Micromachining Investigation", Proc. SPIE 0859, Laser Technology II, (19 October 1987); https://doi.org/10.1117/12.943373

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