Glass integrated nanochannel waveguide for concentration measurements

E. Jardinier; D. Bucci; L. Couston; F. Canto; A. Magnaldo; J.-E. Broquin

doi:10.1117/12.2002431

6 March 2013 Glass integrated nanochannel waveguide for concentration measurements

E. Jardinier, D. Bucci, L. Couston, F. Canto, A. Magnaldo, J.-E. Broquin

Proceedings Volume 8627, Integrated Optics: Devices, Materials, and Technologies XVII; 86270L (2013) https://doi.org/10.1117/12.2002431
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

We present a new integrated optical sensor for absorption spectroscopy in a hostile environment, based on a nanochannel waveguide structure in glass. The nanochannel waveguide is made by bonding two ion-exchanged borosilicate glass wafers, one of them being etched by reactive ion etching to create a 100 nm deep fluidic channel. Typical fluid/light interaction factors of 2.3 % can be achieved inside a 7.4 pL volume of fluid, over a 550 nm bandwidth, surmounting evanescent wave sensors in terms of confinement efficiency and allowing spectrometric measurements. Absorption measurements have been performed on hexahydrate neodymium nitrate in nitric acid solutions of various concentrations leading to a minimum detectable absorption coefficient of 0.57 cm^-1, which can be further decreased by implementing low bending-loss spiral-like nanochannel waveguides.

Citation Download Citation

E. Jardinier, D. Bucci, L. Couston, F. Canto, A. Magnaldo, and J.-E. Broquin "Glass integrated nanochannel waveguide for concentration measurements", Proc. SPIE 8627, Integrated Optics: Devices, Materials, and Technologies XVII, 86270L (6 March 2013); https://doi.org/10.1117/12.2002431

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