Investigation of nanostructures morphology of rough silicon surface irradiated by nanosecond laser pulses in distilled water

M. Sobhani; M. H. Mahdieh; F. Pahang

doi:10.1117/12.2010384

30 January 2013 Investigation of nanostructures morphology of rough silicon surface irradiated by nanosecond laser pulses in distilled water

M. Sobhani, M. H. Mahdieh, F. Pahang

Author Affiliations +

Proceedings Volume 8677, XIX International Symposium on High-Power Laser Systems and Applications 2012; 86771P (2013) https://doi.org/10.1117/12.2010384
Event: XIX International Symposium on High-Power Laser Systems and Applications, 2012, Istanbul, Turkey

Abstract

In this paper, we present experimental results of an investigation in silicon surface morphology induced by nanosecond laser pulses in distilled water. The silicon surface was initially rough at micro-scale and irradiated by nanosecond regime laser at different pulse numbers and fluences. Under the conditions of the experiment, nano-structure cluster morphology was formed on the surface of silicon after exposed to the laser beam. The effective diameter and surface density of clusters were estimated from the SEM images of irradiated silicon. Optical reflectivity of silicon surface was also measured by a probe beam. The reflectivity results present an estimation of the clusters height. The results show that the number of nanoclusters depends effectively on laser fluence and pulse numbers. Moreover, the nanoclusters height is influenced by pulse numbers.

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M. Sobhani, M. H. Mahdieh, and F. Pahang "Investigation of nanostructures morphology of rough silicon surface irradiated by nanosecond laser pulses in distilled water", Proc. SPIE 8677, XIX International Symposium on High-Power Laser Systems and Applications 2012, 86771P (30 January 2013); https://doi.org/10.1117/12.2010384

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