Block-copolymer healing of simple defects in a chemoepitaxial template

Paul N. Patrone; Gregg M. Gallatin

doi:10.1117/12.2011656

26 March 2013 Block-copolymer healing of simple defects in a chemoepitaxial template

Paul N. Patrone, Gregg M. Gallatin

Proceedings Volume 8680, Alternative Lithographic Technologies V; 86801R (2013) https://doi.org/10.1117/12.2011656
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Using the Leibler-Ohta-Kawasaki (LOK) phase-field model of block copolymers (BCPs), we characterize how a chemoepitaxial template with parallel lines of arbitrary width affects the BCP microdomain shape. We apply boundary conditions that account for the interactions of the polymers with the templated substrate and a neutral top-coat. We derive formulas for the monomer density and the microdomain interface profile of periodic, lamellar BCP melts whose template lines are wider or narrower than the bulk microdomain width. For such systems, our analysis (i) shows that mass conservation causes the microdomain interfaces to oscillate about their bulk positions and (ii) determines the length scale λ over which these oscillations decay away from the substrate.

Citation Download Citation

Paul N. Patrone and Gregg M. Gallatin "Block-copolymer healing of simple defects in a chemoepitaxial template", Proc. SPIE 8680, Alternative Lithographic Technologies V, 86801R (26 March 2013); https://doi.org/10.1117/12.2011656

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