Fabrication of optical film derived from biomass using eco-friendly nanoimprint lithography

Satoshi Takei; Gaku Murakami; Yuto Mori; Takumi Ichikawa; Atsushi Sekiguchi; Tsutomu Obata; Yoshiyuki Yokoyama; Wataru Mizuno; Junji Sumioka; Yuji Horita

doi:10.1117/12.2010645

29 March 2013 Fabrication of optical film derived from biomass using eco-friendly nanoimprint lithography

Satoshi Takei, Gaku Murakami, Yuto Mori, Takumi Ichikawa, Atsushi Sekiguchi, Tsutomu Obata, Yoshiyuki Yokoyama, Wataru Mizuno, Junji Sumioka, Yuji Horita

Author Affiliations +

Proceedings Volume 8682, Advances in Resist Materials and Processing Technology XXX; 868224 (2013) https://doi.org/10.1117/12.2010645
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

This paper presents the chemical design and fabrication of optical film derived from biomass using eco-friendly nanoimprint lithography. The optical film derived from biomass with subwavelength structures was successfully demonstrated in specific desired properties. The linearly polymerized polysaccharide in optical film derived from biomass indicated two effects of high concentration of acrylate group in the side-chain terminus for highly sensitivity, and the ring components containing bulky disaccharide for suitable optical properties. The optical film derived from biomass is applicable to future development of antireflective material with subwavelength structures and suitable refractive index material as a chemical design concept.

Citation Download Citation

Satoshi Takei, Gaku Murakami, Yuto Mori, Takumi Ichikawa, Atsushi Sekiguchi, Tsutomu Obata, Yoshiyuki Yokoyama, Wataru Mizuno, Junji Sumioka, and Yuji Horita "Fabrication of optical film derived from biomass using eco-friendly nanoimprint lithography", Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 868224 (29 March 2013); https://doi.org/10.1117/12.2010645

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