Use of x-ray microtomography for 3D imaging of internal structures

Miroslav Hain; Jan Bartl; Robert Ševčík; Vlado Jacko

doi:10.1117/12.2008198

18 December 2012 Use of x-ray microtomography for 3D imaging of internal structures

Miroslav Hain, Jan Bartl, Robert Ševčík, Vlado Jacko

Proceedings Volume 8697, 18th Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 86972E (2012) https://doi.org/10.1117/12.2008198
Event: 18th Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2012, Ostravice, Czech Republic

Abstract

The article describes the basic principles and the use of X-ray microtomography which has emerged as a new promising method of measurement and non-destructive testing. X-ray microtomography (μCT) combines the principles of X-ray shadow microscopy together with the computed tomography CT. The current technical possibilities allow achieving submicron resolution by the use of experimental as well as commercial μCT facilities. Use of this method can be found particularly in materials research, precision engineering, and electronics industry. In all these areas there is a need for a non-destructive, high resolution visualization of internal microstructures, measurement of interior dimensions of 3D objects, materials testing for the presence of internal defects. Unlike the nondestructive μCT, the conventional testing methods require for the observation of internal structures mechanical cutting of the object and thus its destruction. Such damage of the object under study is often unacceptable, especially when it concerns an object of research, which should be preserved in integrity for its uniqueness or need to take further measurements and tests. Besides the materials research, there are also many other important areas of application of X-ray microtomography measuring method: electronics and precision mechanical engineering industry, mineralogy, geology, biology and archeology. In the experimental part of this article the results achieved in the microtomography laboratory of Slovak Academy of Sciences, equipped with the GE phoenix|x-ray nanotom 180 facility, will be presented.

Citation Download Citation

Miroslav Hain, Jan Bartl, Robert Ševčík, and Vlado Jacko "Use of x-ray microtomography for 3D imaging of internal structures", Proc. SPIE 8697, 18th Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 86972E (18 December 2012); https://doi.org/10.1117/12.2008198

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KEYWORDS

X-rays

Nondestructive evaluation

X-ray imaging

Visualization

Sensors

X-ray microscopy

Electronics

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