Evaluation of Spatial Straightness Error using LaserTRACER

Mingzhao He; Xiaoyou Ye; Jianshuang Li; Xiaochuan Gan

doi:10.1117/12.2014642

31 January 2013 Evaluation of Spatial Straightness Error using LaserTRACER

Mingzhao He, Xiaoyou Ye, Jianshuang Li, Xiaochuan Gan

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87593S (2013) https://doi.org/10.1117/12.2014642
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

In order to improve the evaluation precision of spatial straightness error, new measurement setup using 4 LaserTRACERs were built at National Institute of Metrology (NIM). The LaserTRACER is a length measurement device with sub-micron accuracy. In principle, the LaserTRACER is a traceable interferometer. Experiment was implemented on a granite rail with air-suspending slider to test the spatial straightness of the rail. In the experiment, the retroreflector was mounted on slider and moves alone the rail after the spatial frame of axes was built. Using 4 LaserTRACERs, the spatial coordinates can be calculated by Multilateration algorithm. The optimal arrangement of LaserTRACERs is studied by simulation and experiment. The mathematical model based on GBT11336-2004 was built, and Least squares method is used in the spatial line fitting. The measurement principle and results were verified by comparison with SpatialAnalyzer and Metrolog XG.

Citation Download Citation

Mingzhao He, Xiaoyou Ye, Jianshuang Li, and Xiaochuan Gan "Evaluation of Spatial Straightness Error using LaserTRACER", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87593S (31 January 2013); https://doi.org/10.1117/12.2014642

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