Calibration of sensor system used in ultra-precision form measuring instrument

J. Z. Z. Huang; T. Sun; B. M. M. Hu; W. Gu; L. L. L. Zhang

doi:10.1117/12.2019107

31 January 2013 Calibration of sensor system used in ultra-precision form measuring instrument

J. Z. Z. Huang, T. Sun, B. M. M. Hu, W. Gu, L. L. L. Zhang

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87594P (2013) https://doi.org/10.1117/12.2019107
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

Static and dynamic calibration methods of sensor system used in ultra-precision form measuring instrument are investigated. The nonlinear error of sensor system are corrected through static calibration, and the nonlinear characteristic of sensor system is obtained with a piezo nanopositioning stage, then the nonlinear characteristic is stored in a computer in the form of error correction function, while the sensor system works, according to the established error correction function, corrected value of nonlinear error that correspond to the measured point is to be taken out automatically, and the actual measurement data could be compensated by real-time, namely, the dynamic compensation model for nonlinear error could be established. Especially, if the position of measurement data point is not the same as that pre-stored in computer, corrected value could be obtained using linear interpolation. Dynamic calibration of sensor system is performed using the elliptical standards, and in this case the calibration status of sensor system is consistent with its normal measurement status.

Citation Download Citation

J. Z. Z. Huang, T. Sun, B. M. M. Hu, W. Gu, and L. L. L. Zhang "Calibration of sensor system used in ultra-precision form measuring instrument", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87594P (31 January 2013); https://doi.org/10.1117/12.2019107

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available