Thermally actuated micropump for biological and medical application

D. Rabaud; R. Lefevre; A. Salette; L. Dargent; H. Marko; Q. Le Masne; C. Dehan; P. Morfouli; L. Montès

doi:10.1117/12.2017916

10 June 2013 Thermally actuated micropump for biological and medical application

D. Rabaud, R. Lefevre, A. Salette, L. Dargent, H. Marko, Q. Le Masne, C. Dehan, P. Morfouli, L. Montès

Proceedings Volume 8765, Bio-MEMS and Medical Microdevices; 876506 (2013) https://doi.org/10.1117/12.2017916
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

While most actual micropumps use piezoelectric based actuators, we present an original approach based on bimetallic effect for deflecting a flexible silicon membranes. We have simulated, fabricated and characterized fully integrated thermally actuated membranes. Analytical and numerical models have been used to simulate and optimize the performance of the actuated diaphragm. It predicts the deflection behavior under definite power actuation and pressure. In particular, heat transfer analysis is conducted to evaluate temperature field distribution within the device. High displacements (~80μm) where obtained under low driving power. Our results show a very good fit between experiments under pressure and theoretical predictions.

Citation Download Citation

D. Rabaud, R. Lefevre, A. Salette, L. Dargent, H. Marko, Q. Le Masne, C. Dehan, P. Morfouli, and L. Montès "Thermally actuated micropump for biological and medical application", Proc. SPIE 8765, Bio-MEMS and Medical Microdevices, 876506 (10 June 2013); https://doi.org/10.1117/12.2017916

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available