Fabrication of multilevel spiral phase plates by focused ion beam milling

V. Pramitha; A. Vijayakumar; Shanti Bhattacharya

doi:10.1117/12.2021061

22 June 2013 Fabrication of multilevel spiral phase plates by focused ion beam milling

V. Pramitha, A. Vijayakumar, Shanti Bhattacharya

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87691S (2013) https://doi.org/10.1117/12.2021061
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

A focused Ga⁺ ion beam is used to mill a multilevel spiral phase plate at an acceleration voltage of 30 kV. Circular spiral phase plate with eight levels is fabricated directly on an indium-tin-oxide coated glass plate. Scanning electron microscopy images demonstrate the realization of multilevel phase plate on glass plate using focused ion beam milling.

Citation Download Citation

V. Pramitha, A. Vijayakumar, and Shanti Bhattacharya "Fabrication of multilevel spiral phase plates by focused ion beam milling", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691S (22 June 2013); https://doi.org/10.1117/12.2021061

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available