Numerical investigations of the influence of different commonly applied approximations in scatterometry

J. Endres; S. Burger; M. Wurm; B. Bodermann

doi:10.1117/12.2022108

13 May 2013 Numerical investigations of the influence of different commonly applied approximations in scatterometry

J. Endres, S. Burger, M. Wurm, B. Bodermann

Proceedings Volume 8789, Modeling Aspects in Optical Metrology IV; 878904 (2013) https://doi.org/10.1117/12.2022108
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

At PTB we investigate the prospects of scatterometric methods for quantitative dimensional metrology of periodic micro- and nanostructures. Commonly applied approximations and simplifications may lead to contributions to the measurement uncertainty or even to systematic measurement errors. Here we present a short overview about the main effects connected with these simplifications. In particular we present numerical investigations of the influence of a finite beam size on the scatterometry results. The results indicate, that an impact of the finite beam size becomes significant only for tightly focused beams with a beam waist radius w_o smaller than 10 μm.

Citation Download Citation

J. Endres, S. Burger, M. Wurm, and B. Bodermann "Numerical investigations of the influence of different commonly applied approximations in scatterometry", Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 878904 (13 May 2013); https://doi.org/10.1117/12.2022108

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available