Focussed ion beam machining of an in-fibre 45-degree  mirror for fibre end sensors

J. Li; J. N. Sun; M. M. Miliar; J. M. Ritchie; X. Luo; R. R. J. Maier; D. P. Hand; W. N. MacPherson

doi:10.1117/12.2025714

20 May 2013 Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors

J. Li, J. N. Sun, M. M. Miliar, J. M. Ritchie, X. Luo, R. R. J. Maier, D. P. Hand, W. N. MacPherson

Proceedings Volume 8794, Fifth European Workshop on Optical Fibre Sensors; 879404 (2013) https://doi.org/10.1117/12.2025714
Event: Fifth European Workshop on Optical Fibre Sensors, 2013, Krakow, Poland

Abstract

Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm.

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J. Li, J. N. Sun, M. M. Miliar, J. M. Ritchie, X. Luo, R. R. J. Maier, D. P. Hand, and W. N. MacPherson "Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors", Proc. SPIE 8794, Fifth European Workshop on Optical Fibre Sensors, 879404 (20 May 2013); https://doi.org/10.1117/12.2025714

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