Overview on the high power excimer laser technology

Jingru Liu

doi:10.1117/12.2011186

16 May 2013 Overview on the high power excimer laser technology

Jingru Liu

Proceedings Volume 8796, 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012); 87961L (2013) https://doi.org/10.1117/12.2011186
Event: 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012), 2012, Xi'an, Shaanxi, China

Abstract

High power excimer laser has essential applications in the fields of high energy density physics, inertial fusion energy and industry owing to its advantages such as short wavelength, high gain, wide bandwidth, energy scalable and repetition operating ability. This overview is aimed at an introduction and evaluation of enormous endeavor of the international high power excimer laser community in the last 30 years. The main technologies of high power excimer laser are reviewed, which include the pumping source technology, angular multiplexing and pulse compressing, beam-smoothing and homogenous irradiation, high efficiency and repetitive operation et al. A high power XeCl laser system developed in NINT of China is described in detail.

Citation Download Citation

Jingru Liu "Overview on the high power excimer laser technology", Proc. SPIE 8796, 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012), 87961L (16 May 2013); https://doi.org/10.1117/12.2011186

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