Composition depth profiling by soft x-ray laser-ablation mass spectrometry

Ilya Kuznetsov; Jorge Filevich; M. Woolston; Elliot R. Bernstein; Dean C. Crick; D. Carlton; W. Chao; E. H. Anderson; Jorge J. Rocca; Carmen S. Menoni

doi:10.1117/12.2024535

27 September 2013 Composition depth profiling by soft x-ray laser-ablation mass spectrometry

Ilya Kuznetsov, Jorge Filevich, M. Woolston, Elliot R. Bernstein, Dean C. Crick, D. Carlton, W. Chao, E. H. Anderson, Jorge J. Rocca, Carmen S. Menoni

Author Affiliations +

Proceedings Volume 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X; 88490G (2013) https://doi.org/10.1117/12.2024535
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Mass spectrometry plays a vital role in the direct examination of the chemical composition of solids. We have introduced the use of soft x-ray laser ablation for mass spectrometry imaging. Here we demonstrate the method potential for composition depth profiling of multilayer stacks consisting of tens of nanometers thick metal and dielectric films.

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Ilya Kuznetsov, Jorge Filevich, M. Woolston, Elliot R. Bernstein, Dean C. Crick, D. Carlton, W. Chao, E. H. Anderson, Jorge J. Rocca, and Carmen S. Menoni "Composition depth profiling by soft x-ray laser-ablation mass spectrometry", Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490G (27 September 2013); https://doi.org/10.1117/12.2024535

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