Paper
15 October 2013 OptiCentric lathe centering machine
C. Buß, J. Heinisch
Author Affiliations +
Proceedings Volume 8884, Optifab 2013; 88842F (2013) https://doi.org/10.1117/12.2034593
Event: SPIE Optifab, 2013, Rochester, New York, United States
Abstract
High precision optics depend on precisely aligned lenses. The shift and tilt of individual lenses as well as the air gap between elements require accuracies in the single micron regime. These accuracies are hard to meet with traditional assembly methods. Instead, lathe centering can be used to machine the mount with respect to the optical axis. Using a diamond turning process, all relevant errors of single mounted lenses can be corrected in one post-machining step. Building on the OptiCentric® and OptiSurf® measurement systems, Trioptics has developed their first lathe centering machines. The machine and specific design elements of the setup will be shown. For example, the machine can be used to turn optics for i-line steppers with highest precision.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Buß and J. Heinisch "OptiCentric lathe centering machine", Proc. SPIE 8884, Optifab 2013, 88842F (15 October 2013); https://doi.org/10.1117/12.2034593
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KEYWORDS
Lenses

Spindles

Autocollimators

Diamond machining

Sensors

Diamond

Optical testing

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