Metal oxide nanostructures for gas detection

Wojciech Maziarz; Tadeusz Pisarkiewicz; Artur Rydosz; Kinga Wysocka; Grzegorz Czyrnek

doi:10.1117/12.2030298

25 July 2013 Metal oxide nanostructures for gas detection

Wojciech Maziarz, Tadeusz Pisarkiewicz, Artur Rydosz, Kinga Wysocka, Grzegorz Czyrnek

Proceedings Volume 8902, Electron Technology Conference 2013; 890226 (2013) https://doi.org/10.1117/12.2030298
Event: Electron Technology Conference 2013, 2013, Ryn, Poland

Abstract

Currently, most of gas sensors on the market are produced in thin or thick film technologies with the use of ceramic substrates. It is expected that the miniature sensors needed in portable applications will be based on one-dimensional structures due to their low power consumption, fast and stable time response, small dimensions and possibility of embedding in integrated circuit together with signal conditioning electronics. The authors manufactured resistance type gas sensors based on ZnO and WO₃ nanostructures. ZnO:Al nanorods with good cristallinity were obtained with electrodeposition method, while ZnO:Al nanofibres with varying diameters were obtained by electrospinning method. The sensors were built as a nanowire network. WO₃ films with nanocrystalline surface were manufactured by deposition of a three layer WO₃/W/WO₃ structure by RF sputtering and successive annealing of the structure in appropriate temperature range. In effect a uniform nanostructurized metal oxide layer was formed. Investigation of sensors characteristics revealed good sensitivity to nitrogen dioxide at temperatures lower than these for conventional conductometric type sensors.

Citation Download Citation

Wojciech Maziarz, Tadeusz Pisarkiewicz, Artur Rydosz, Kinga Wysocka, and Grzegorz Czyrnek "Metal oxide nanostructures for gas detection", Proc. SPIE 8902, Electron Technology Conference 2013, 890226 (25 July 2013); https://doi.org/10.1117/12.2030298

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