A small angle dynamic measuring device

Jie Wang; Xiaojun Liu; Liping Zhou; Wenlong Lu; Liangzhou Chen; Yimin Zou

doi:10.1117/12.2041641

10 October 2013 A small angle dynamic measuring device

Jie Wang, Xiaojun Liu, Liping Zhou, Wenlong Lu, Liangzhou Chen, Yimin Zou

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 891648 (2013) https://doi.org/10.1117/12.2041641
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

Small angle measurement has been widely use for the alignment or error compensation of a mechanical system. In this paper a small angle dynamic measurement device based on laser interference technique is introduced, which consists of a reference module and a measuring module. The measuring module is fixed on the measured object. With the variation of the small tilt angle of the measured object, the phase difference between the two beams from prism1 and prism2 changes according to it. By analyzing the interference patterns, the variation of the small tilt angle can be obtained dynamically. Experimental setup has been established and the results show that the measurement range is 15' with the resolution of 0.08", the measurement error is less than 8″.

Citation Download Citation

Jie Wang, Xiaojun Liu, Liping Zhou, Wenlong Lu, Liangzhou Chen, and Yimin Zou "A small angle dynamic measuring device", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891648 (10 October 2013); https://doi.org/10.1117/12.2041641

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