Linear And Differential Techniques In The Scanning Optical Microscope

M.Vaez Iravani; C W See

doi:10.1117/12.944507

12 July 1988 Linear And Differential Techniques In The Scanning Optical Microscope

M.Vaez Iravani, C W See

Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944507
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

The limitations of the scanning optical microscope in producing high contrast images of nearly uniform objects are discussed. It is shown that by resorting to linear and differential imaging concepts, a number of techniques can be devised 'which overcome such inherent limitations. The design and operation of a scanning differential amplitude, and linear differential interference contrast microscopes are discussed, and a number of experimental results are presented. These microscopes are capable of stable operation and sensitivity down to 10^-6 in detecting a refractive index change, and 1.5>10^-4nm height variation, in a 1 kHz bandwidth.

Citation Download Citation

M.Vaez Iravani and C W See "Linear And Differential Techniques In The Scanning Optical Microscope", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); https://doi.org/10.1117/12.944507

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