Newly developed broadband plasmonic absorber for uncooled infrared detectors

Hae-Seok Park; Sung Hyun Nam; Hyun-Gue Hong; Sookyoung Roh; Seokho Yun; JungWoo Kim; Dongil Kwon; U-In Chung

doi:10.1117/12.2036406

7 March 2014 Newly developed broadband plasmonic absorber for uncooled infrared detectors

Hae-Seok Park, Sung Hyun Nam, Hyun-Gue Hong, Sookyoung Roh, Seokho Yun, JungWoo Kim, Dongil Kwon, U-In Chung

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 89770I (2014) https://doi.org/10.1117/12.2036406
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

In this paper, we introduce a floating plasmonic absorber having multiple resonances in the 8 ~ 14 μm spectral range and broadband absorption characteristics by adjusting Drude relaxation rate of metal. This plasmonic broadband resonator capable of capturing light with a large optical cross-section area is able to substantially enhance the performance of micro-bolometer (response time, noise equivalent temperature difference, pixel size and so on) due to the significantly reduced thermal mass and conductance. Firstly, to adjust Drude relaxation rate, the mean crystalline size of metal was optimized by changing the deposition condition and the absorption characteristics of absorber were measured by Fourier transform infrared spectroscopy in the 8 ~ 14 μm spectral range. The measurement results show that 1.62 times of broadening in bandwidth was obtained by decreasing the crystalline size from 5.73 nm to 3.18 nm while maintaining the maximum absorption at resonant wavelength of 10 μm within 93 ~ 95%. Comparisons between measurements and CST microwave studio simulations show similar spectral absorption trends. And then, to integrate plasmonic absorber with micro-bolometer, various kinds of plasmonic absorbers which have combinations of short and long dipole resonators were designed and simulated. Based on these results, 12 μm micro-bolometer pixels integrated with plasmonic broadband Ti absorber are designed and fabricated. The optimized Ti resonators with multiple resonance and small crystalline size absorb 88 % of the unpolarized radiation in the 8 ~ 14 μm spectral range on the average.

Citation Download Citation

Hae-Seok Park, Sung Hyun Nam, Hyun-Gue Hong, Sookyoung Roh, Seokho Yun, JungWoo Kim, Dongil Kwon, and U-In Chung "Newly developed broadband plasmonic absorber for uncooled infrared detectors", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770I (7 March 2014); https://doi.org/10.1117/12.2036406

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available