Three-dimensional collimation of in-plane-propagating light using silicon micromachined mirror

Yasser M. Sabry; Diaa Khalil; Bassam Saadany; Tarik Bourouina

doi:10.1117/12.2038671

7 March 2014 Three-dimensional collimation of in-plane-propagating light using silicon micromachined mirror

Yasser M. Sabry, Diaa Khalil, Bassam Saadany, Tarik Bourouina

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 89770J (2014) https://doi.org/10.1117/12.2038671
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

We demonstrate light collimation of single-mode optical fibers using deeply-etched three-dimensional curved micromirror on silicon chip. The three-dimensional curvature of the mirror is controlled by a process combining deep reactive ion etching and isotropic etching of silicon. The produced surface is astigmatic with out-of-plane radius of curvature that is about one half the in-plane radius of curvature. Having a 300-μm in-plane radius and incident beam inplane inclined with an angle of 45 degrees with respect to the principal axis, the reflected beam is maintained stigmatic with about 4.25 times reduction in the beam expansion angle in free space and about 12-dB reduction in propagation losses, when received by a limited-aperture detector.

Citation Download Citation

Yasser M. Sabry, Diaa Khalil, Bassam Saadany, and Tarik Bourouina "Three-dimensional collimation of in-plane-propagating light using silicon micromachined mirror", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770J (7 March 2014); https://doi.org/10.1117/12.2038671

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