Effects of substrate temperature on morphology, structure and chemical composition of Cu2S films

Bing Ren; Jian Huang; Lin Wang; Ke Tang; Kaifeng Qin; Zhangmin Pan; Linjun Wang; Yiben Xia

doi:10.1117/12.2054098

16 December 2013 Effects of substrate temperature on morphology, structure and chemical composition of Cu₂S films

Bing Ren, Jian Huang, Lin Wang, Ke Tang, Kaifeng Qin, Zhangmin Pan, Linjun Wang, Yiben Xia

Proceedings Volume 9068, Eighth International Conference on Thin Film Physics and Applications; 90680L (2013) https://doi.org/10.1117/12.2054098
Event: Eighth International Conference on Thin Film Physics and Applications (TFPA13), 2013, Shanghai, China

Abstract

Cu₂S thin films have been deposited on CdS/ITO (In₂O₃:Sn) substrates with various substrate temperatures by DC magnetron sputtering method. The effects of substrate temperature on the crystallization behavior and morphology are studied. Chemical composition of the films is confirmed by energy dispersive X-ray (EDX) spectroscopy. X-ray diffraction (XRD) analysis of the films reveals they have polycrystalline chalcocite structure with (110) texture. Field emission scanning electron microscopy (FESEM) show the crystalline nature of the films at higher substrate temperature, which is in accordance with XRD measurements. Stoichiometric analysis exhibits element composition with Cu/S concentrations ratio equal to 2 approximately.

Citation Download Citation

Bing Ren, Jian Huang, Lin Wang, Ke Tang, Kaifeng Qin, Zhangmin Pan, Linjun Wang, and Yiben Xia "Effects of substrate temperature on morphology, structure and chemical composition of Cu₂S films", Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90680L (16 December 2013); https://doi.org/10.1117/12.2054098

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