Paper
2 May 2014 Raman spectroscopy and periodic surface structures of Mg:ZnO thin film fabricated by femtosecond laser pulses
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Abstract
Mg doped ZnO thin films were prepared by magnetron sputtering and were irradiated by linearly polarized femtosecond laser pulse. Scanning electron microscopy (SEM) characterizations illustrated that regularly arranged nanoripples appeared on the ablation area with the period perpendicular to the polarization direction in the range of 250 nm~570 nm, but parallel to the polarization direction in the range of 2.2 µm~2.5 µm. The redshift of Raman peaks was observed at the central ablation area of the nanoripples, while, both blueshift and redshift were found at the edge area, which could be ascribed to the defects as well as the nanoripple structure.
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Hongying Wang, Zhen Cheng, Guanghua Cheng, Fei Ma, and Yuanyuan Li "Raman spectroscopy and periodic surface structures of Mg:ZnO thin film fabricated by femtosecond laser pulses", Proc. SPIE 9126, Nanophotonics V, 91261X (2 May 2014); https://doi.org/10.1117/12.2051212
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KEYWORDS
Pulsed laser operation

Raman spectroscopy

Thin films

Femtosecond phenomena

Laser ablation

Scanning electron microscopy

Polarization

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