Metrology system for the calibration of multi-dof mechanisms

Lorenzo Zago; Mirsad Sarajlic; Fabien Chevalley

doi:10.1117/12.2057673

28 July 2014 Metrology system for the calibration of multi-dof mechanisms

Lorenzo Zago, Mirsad Sarajlic, Fabien Chevalley

Proceedings Volume 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation; 91513V (2014) https://doi.org/10.1117/12.2057673
Event: SPIE Astronomical Telescopes + Instrumentation, 2014, Montréal, Quebec, Canada

Abstract

This paper presents a novel absolute position metrology system developed in our institute based on a concept using industrial vision by which USB cameras observe targets provided with special dots patterns. The system was originally devised for precision 2D measurements, then extended to 6-degree-of-freedom setups. This particular metrology system has been developed for testing and calibrating the precision hexapods aligning the secondary mirrors of the ESO VLTI auxiliary telescopes but its principle can be used for measuring the accuracy of any multi-degree-of-freedom mechanisms. The accuracy/resolution of the metrology system is typically 2-5 μm along linear degrees of freedom, respectively 5 arcsec for tip-tilt. This method is particularly affordable in cost, robust, yet accurate enough for most precision measurements in astronomical optomechanics.

Citation Download Citation

Lorenzo Zago, Mirsad Sarajlic, and Fabien Chevalley "Metrology system for the calibration of multi-dof mechanisms", Proc. SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 91513V (28 July 2014); https://doi.org/10.1117/12.2057673

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available