Fused silica fine grinding with low roughness

Lei Dai; Yongqiang Gu; Di Wu

doi:10.1117/12.2070306

6 August 2014 Fused silica fine grinding with low roughness

Lei Dai, Yongqiang Gu, Di Wu

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92810Y (2014) https://doi.org/10.1117/12.2070306
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Lithography-optics is one of the most complex optical systems. The fine grinding process is the most important step before polishing. Roughness and sub-surface damage (SSD) are essential outputs of fine grinding. We demonstrate the method that use fix abrasive cup tool with CNC grinding machine to complete the fine grinding process, even instead of lapping process. And experiment sample roughness can reach 23.40nm rms and Ra 18.554nm. The SSD estimate is about 2 μm which is also smaller than commercial lapping process. The fine grinding output can satisfy the lithography optic fabrication demands and efficiently reduce the polishing time.

Citation Download Citation

Lei Dai, Yongqiang Gu, and Di Wu "Fused silica fine grinding with low roughness", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92810Y (6 August 2014); https://doi.org/10.1117/12.2070306

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