Research on the magnetorheological finishing (MRF) technology with dual polishing heads

Wen Huang; Yunfei Zhang; Jianguo He; Yongcheng Zheng; Qing Luo; Jing Hou; Zhigang Yuan

doi:10.1117/12.2069796

20 August 2014 Research on the magnetorheological finishing (MRF) technology with dual polishing heads

Wen Huang, Yunfei Zhang, Jianguo He, Yongcheng Zheng, Qing Luo, Jing Hou, Zhigang Yuan

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92811U (2014) https://doi.org/10.1117/12.2069796
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Magnetorheological finishing (MRF) is a key polishing technique capable of rapidly converging to the required surface figure. Due to the deficiency of general one-polishing-head MRF technology, a dual polishing heads MRF technology was studied and a dual polishing heads MRF machine with 8 axes was developed. The machine has the ability to manufacture large aperture optics with high figure accuracy. The large polishing head is suitable for polishing large aperture optics, controlling large spatial length’s wave structures, correcting low-medium frequency errors with high removal rates. While the small polishing head has more advantages in manufacturing small aperture optics, controlling small spatial wavelength’s wave structures, correcting mid-high frequency and removing nanoscale materials. Material removal characteristic and figure correction ability for each of large and small polishing head was studied. Each of two polishing heads respectively acquired stable and valid polishing removal function and ultra-precision flat sample. After a single polishing iteration using small polishing head, the figure error in 45mm diameter of a 50 mm diameter plano optics was significantly improved from 0.21λ to 0.08λ by PV (RMS 0.053λ to 0.015λ). After three polishing iterations using large polishing head , the figure error in 410mm×410mm of a 430mm×430mm large plano optics was significantly improved from 0.40λ to 0.10λ by PV (RMS 0.068λ to 0.013λ) .This results show that the dual polishing heads MRF machine not only have good material removal stability, but also excellent figure correction capability.

Citation Download Citation

Wen Huang, Yunfei Zhang, Jianguo He, Yongcheng Zheng, Qing Luo, Jing Hou, and Zhigang Yuan "Research on the magnetorheological finishing (MRF) technology with dual polishing heads", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92811U (20 August 2014); https://doi.org/10.1117/12.2069796

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