A biaxial PZT optical scanner for pico-projector applications

K. Ikegami; T. Koyama; T. Saito; Y. Yasuda; H. Toshiyoshi

doi:10.1117/12.2085637

27 February 2015 A biaxial PZT optical scanner for pico-projector applications

K. Ikegami, T. Koyama, T. Saito, Y. Yasuda, H. Toshiyoshi

Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 93750M (2015) https://doi.org/10.1117/12.2085637
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

We report a newly developed two-dimensional MEMS optical scanner based on the ADRIP (Arc Discharge Reactive Ion-Plating) deposited piezoelectric PZT film of typical 4 μm. A circular mirror of 1.2 mm in diameter is suspended within a pair of resonant mechanism that oscillates at 25 kHz for ±12° mechanical angle with a typical voltage of 10 V. A gimbal plate including the mirror is supported with another pair of meandering suspensions to tilt the plate in the orthogonal direction at 60 Hz for the off-resonant vertical motion of ±8° mechanical. Overall power consumption of the piezoelectric actuation was 100 mW or less. As a mechanical reinforce, a rib-structure was designed on the backside of the mirror by using a structural optimization tool TOSCA to suppress the dynamic curvature to 100 nm or less. A piezoelectric sensor was also integrated in the identical PZT film after optimizing the electrode shape to pick up the mechanical angle of the scanner and to give a trigger signal to the control system. A plug-in type pico-projector optics and electronics has been assembled in a 7.5 cm × 12 cm × 5 cm volume with RGB lasers to demonstrate a HD (high definition) class image projection of 720 horizontal lines. The fundamental resonance of the entire scanner mechanism was made to be 1 kHz or higher, thereby exhibiting a compatibility with vehicle applications.

Citation Download Citation

K. Ikegami, T. Koyama, T. Saito, Y. Yasuda, and H. Toshiyoshi "A biaxial PZT optical scanner for pico-projector applications", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750M (27 February 2015); https://doi.org/10.1117/12.2085637

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