A method of image-based aberration metrology for EUVL tools

Zac Levinson; Sudharshanan Raghunathan; Erik Verduijn; Obert Wood II; Pawitter Mangat; Kenneth Goldberg; Markus Benk; Antoine Wojdyla; Vicky Philipsen; Eric Hendrickx; Bruce W. Smith

doi:10.1117/12.2087177

16 March 2015 A method of image-based aberration metrology for EUVL tools

Zac Levinson, Sudharshanan Raghunathan, Erik Verduijn, Obert Wood II, Pawitter Mangat, Kenneth Goldberg, Markus Benk, Antoine Wojdyla, Vicky Philipsen, Eric Hendrickx, Bruce W. Smith

Author Affiliations +

Proceedings Volume 9422, Extreme Ultraviolet (EUV) Lithography VI; 942215 (2015) https://doi.org/10.1117/12.2087177
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

We present an approach to image-based EUV aberration metrology using binary mask targets and iterative model-based solutions to extract both the amplitude and phase components of the aberrated pupil function. The approach is enabled through previously developed modeling, fitting, and extraction algorithms. We examine the flexibility and criticality of the method using two experimental case studies. The first extracts the pupil phase behavior from an ASML NXE:3100 exposure system and shows primary aberration sensitivity below 0.2 mλ. The second experiment extracts both components of the pupil function from the SHARP EUV microscope.

Citation Download Citation

Zac Levinson, Sudharshanan Raghunathan, Erik Verduijn, Obert Wood II, Pawitter Mangat, Kenneth Goldberg, Markus Benk, Antoine Wojdyla, Vicky Philipsen, Eric Hendrickx, and Bruce W. Smith "A method of image-based aberration metrology for EUVL tools", Proc. SPIE 9422, Extreme Ultraviolet (EUV) Lithography VI, 942215 (16 March 2015); https://doi.org/10.1117/12.2087177

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available