Scatterometric analysis of a plasmonic test structure

Samuel O'Mullane; Nick Keller; Joseph Race; Brian Martinick; Alain Diebold

doi:10.1117/12.2085933

19 March 2015 Scatterometric analysis of a plasmonic test structure

Samuel O'Mullane, Nick Keller, Joseph Race, Brian Martinick, Alain Diebold

Proceedings Volume 9424, Metrology, Inspection, and Process Control for Microlithography XXIX; 942411 (2015) https://doi.org/10.1117/12.2085933
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Traditional ellipsometric measurements of copper gratings are limited to Angstrom resolution and are rather insensitive to changes in the critical dimension (CD) or pitch of the structure. By adding another grating per- pendicular and with larger CD and pitch, sensitivity is greatly enhanced. The spectra of one dimensional grat- ings is largely featureless over a wide range of CDs while crossed-gratings exhibit large minima which shift with changing CDs of less than an Angstrom. This improvement is due to plasmonic activity in the crossed-grating, demonstrated in detail here. Mueller matrix element analysis under azimuthal rotation provides information about cross-polarization and plasmon coupling conditions.

Citation Download Citation

Samuel O'Mullane, Nick Keller, Joseph Race, Brian Martinick, and Alain Diebold "Scatterometric analysis of a plasmonic test structure", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 942411 (19 March 2015); https://doi.org/10.1117/12.2085933

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available