SOI layout decomposition for double patterning lithography on high-performance computer platforms

Vladimir Verstov; Lyudmila Zinchenko; Vladimir Makarchuk

doi:10.1117/12.2180809

18 December 2014 SOI layout decomposition for double patterning lithography on high-performance computer platforms

Vladimir Verstov, Lyudmila Zinchenko, Vladimir Makarchuk

Proceedings Volume 9440, International Conference on Micro- and Nano-Electronics 2014; 94400X (2014) https://doi.org/10.1117/12.2180809
Event: The International Conference on Micro- and Nano-Electronics 2014, 2014, Zvenigorod, Russian Federation

Abstract

In the paper silicon on insulator layout decomposition algorithms for the double patterning lithography on high performance computing platforms are discussed. Our approach is based on the use of a contradiction graph and a modified concurrent breadth-first search algorithm. We evaluate our technique on 45 nm Nangate Open Cell Library including non-Manhattan geometry. Experimental results show that our soft computing algorithms decompose layout successfully and a minimal distance between polygons in layout is increased.

Citation Download Citation

Vladimir Verstov, Lyudmila Zinchenko, and Vladimir Makarchuk "SOI layout decomposition for double patterning lithography on high-performance computer platforms", Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 94400X (18 December 2014); https://doi.org/10.1117/12.2180809

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available