Development of methodology for evaluation of subsurface damage

D. Tomka; F. Procháska; O. Matoušek; J. Polák

doi:10.1117/12.2176024

7 January 2015 Development of methodology for evaluation of subsurface damage

D. Tomka, F. Procháska, O. Matoušek, J. Polák

Proceedings Volume 9442, Optics and Measurement Conference 2014; 94421B (2015) https://doi.org/10.1117/12.2176024
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic

Abstract

The developed method is used for subsurface damage evaluation. It is based on CNC subaperture asymmetric polishing of the surface, which leads to the formation of a wedge with decreasing depth, depending on the diameter and a subsequent analysis of the surface using White - Light Interferometry. In the evaluation, 'negative PV value' method was used enabling the detection of the depth of damage with the accuracy of 1 micron.

Citation Download Citation

D. Tomka, F. Procháska, O. Matoušek, and J. Polák "Development of methodology for evaluation of subsurface damage", Proc. SPIE 9442, Optics and Measurement Conference 2014, 94421B (7 January 2015); https://doi.org/10.1117/12.2176024

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