High precision fabrication of antennas and sensors

A. Balčytis; G. Seniutinas; D. Urbonas; M. Gabalis; K. Vaškevičius; R. Petruškevičius; G. Molis; G. ` Valušis; S. Juodkazis

doi:10.1117/12.2180814

6 March 2015 High precision fabrication of antennas and sensors

A. Balčytis, G. Seniutinas, D. Urbonas, M. Gabalis, K. Vaškevičius, R. Petruškevičius, G. Molis, G. ` Valušis, S. Juodkazis

Author Affiliations +

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94461G (2015) https://doi.org/10.1117/12.2180814
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

Electron and ion beam lithographies were used to fabricate and/or functionalize large scale - millimetre footprint - micro-optical elements: coupled waveguide-resonator structures on silicon-on-insulator (SOI) and THz antennas on low temperature grown LT-GaAs. Waveguide elements on SOI were made without stitching errors using a fixed beam moving stage approach. THz antennas were created using a three-step litography process. First, gold THz antennas defined by standard mask projection lithography were annealed to make an ohmic contact on LT-GaAs and post-processing with Ga-ion beam was used to define nano-gaps and inter digitised contacts for better charge collection. These approaches show the possibility to fabricate large footprint patterns with nanoscale precision features and overlay accuracy. Emerging 3D nanofabrication trends are discussed.

Citation Download Citation

A. Balčytis, G. Seniutinas, D. Urbonas, M. Gabalis, K. Vaškevičius, R. Petruškevičius, G. Molis, G. ` Valušis, and S. Juodkazis "High precision fabrication of antennas and sensors", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94461G (6 March 2015); https://doi.org/10.1117/12.2180814

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available