Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor

Lin Chen; Hongwei Jing; Zhongwei Wei; Xuedong Cao

doi:10.1117/12.2180887

6 March 2015 Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor

Lin Chen, Hongwei Jing, Zhongwei Wei, Xuedong Cao

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 944621 (2015) https://doi.org/10.1117/12.2180887
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology.

Citation Download Citation

Lin Chen, Hongwei Jing, Zhongwei Wei, and Xuedong Cao "Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944621 (6 March 2015); https://doi.org/10.1117/12.2180887

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