Measurement of manufacturing resolution for two photon polymerization structures with different manufacturing parameters

Tien-Tung Chung; Wan-Jou Li; Sheng-Yuan Chen; Chi-Hou Hoi

doi:10.1117/12.2182421

6 March 2015 Measurement of manufacturing resolution for two photon polymerization structures with different manufacturing parameters

Tien-Tung Chung, Wan-Jou Li, Sheng-Yuan Chen, Chi-Hou Hoi

Author Affiliations +

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 944651 (2015) https://doi.org/10.1117/12.2182421
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

This paper studied manufacturing resolutions of micro structures made by two photon polymerization (TPP) technology with different manufacturing parameters. The light source used for the TPP manufacturing system was a low-cost 532 nm Nd:YAG green laser, and the material used was commercial resin Photomer 3015. Two objective lenses, one with magnification of 100 times (100x) and numerical aperture (NA) of 1.3 and the other with 50x and NA0.8 were used in TPP production. The manufacturing resolution, which is also named as voxel size, changed with different manufacturing parameters such as laser power and exposure time. The measurement results of TPP structures manufactured with different manufacturing parameters indicated that the minimum line width produced by the 100x-NA1.3 lens could be reduced down to 67 nanometer (nm), which was quite good for TPP systems with low-cost Nd:YAG laser.

Citation Download Citation

Tien-Tung Chung, Wan-Jou Li, Sheng-Yuan Chen, and Chi-Hou Hoi "Measurement of manufacturing resolution for two photon polymerization structures with different manufacturing parameters", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944651 (6 March 2015); https://doi.org/10.1117/12.2182421

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