Research on detection technology of microstructure of optical surface based on total integrated scattering method

Chunyang Wang; Qiang Wang; Guoxu Ding; Liang Zhao

doi:10.1117/12.2075329

19 February 2015 Research on detection technology of microstructure of optical surface based on total integrated scattering method

Chunyang Wang, Qiang Wang, Guoxu Ding, Liang Zhao

Author Affiliations +

Proceedings Volume 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014); 94493J (2015) https://doi.org/10.1117/12.2075329
Event: The International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference (icPOE 2014), 2014, Xi'an, China

Abstract

This paper proposes that surface roughness of optical element is detected using total integrated scattering method, Meanwhile, establishing the relational model between surface roughness and subsurface damage to get the depth of subsurface damage rapidly and accurately after we measured surface roughness so as to achieve the goal of detection of optical element’s surface microstructure.

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Chunyang Wang, Qiang Wang, Guoxu Ding, and Liang Zhao "Research on detection technology of microstructure of optical surface based on total integrated scattering method", Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94493J (19 February 2015); https://doi.org/10.1117/12.2075329

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