Preparation Of Ion Beam Sputtered Superconducting Y-Ba-Cu-O Thin Films

Kazuki Yoshimura; Shuuichi Nogawa; Sakae Tanemura

doi:10.1117/12.947477

23 August 1988 Preparation Of Ion Beam Sputtered Superconducting Y-Ba-Cu-O Thin Films

Kazuki Yoshimura, Shuuichi Nogawa, Sakae Tanemura

Proceedings Volume 0948, High-Tc Superconductivity: Thin Films and Devices; (1988) https://doi.org/10.1117/12.947477
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

By using ion beam sputtering, the high quality Y-Ba-Cu-O superconducting films were successfully prepared. The superconducting behavior of the films strongly depended on the annealing temperature. The extensive characterization of the prepared films were carried out by measuring the temperature dependence of the resistivity, X-ray diffractometry, electron diffractometry, SEM image, EPMA spectra and XPS spectra.

Citation Download Citation

Kazuki Yoshimura, Shuuichi Nogawa, and Sakae Tanemura "Preparation Of Ion Beam Sputtered Superconducting Y-Ba-Cu-O Thin Films", Proc. SPIE 0948, High-Tc Superconductivity: Thin Films and Devices, (23 August 1988); https://doi.org/10.1117/12.947477

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