2D MEMS scanning for LIDAR with sub-Nyquist sampling, electronics, and measurement procedure

Thorsten Giese; Joachim Janes

doi:10.1117/12.2175851

22 May 2015 2D MEMS scanning for LIDAR with sub-Nyquist sampling, electronics, and measurement procedure

Thorsten Giese, Joachim Janes

Proceedings Volume 9495, Three-Dimensional Imaging, Visualization, and Display 2015; 94950F (2015) https://doi.org/10.1117/12.2175851
Event: SPIE Sensing Technology + Applications, 2015, Baltimore, MD, United States

Abstract

Electrostatic driven 2D MEMS scanners resonantly oscillate in both axes leading to Lissajous trajectories of a digitally modulated laser beam reflected from the micro mirror. A solid angle of about 0.02 is scanned by a 658nm laser beam with a maximum repetition rate of 350MHz digital pulses. Reflected light is detected by an APD with a bandwidth of 80MHz. The phase difference between the scanned laser light and the light reflected from an obstacle is analyzed by sub-Nyquist sampling. The FPGA-based electronics and software for the evaluation of distance and velocity of objects within the scanning range are presented. Furthermore, the measures to optimize the Lidar accuracy of about 1mm and the dynamic range of up to 2m are examined. First measurements demonstrating the capability of the system and the evaluation algorithms are discussed.

Citation Download Citation

Thorsten Giese and Joachim Janes "2D MEMS scanning for LIDAR with sub-Nyquist sampling, electronics, and measurement procedure", Proc. SPIE 9495, Three-Dimensional Imaging, Visualization, and Display 2015, 94950F (22 May 2015); https://doi.org/10.1117/12.2175851

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