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Plasmonic nanograting consisting of thermally-driven Au/SiO2 bimorph beams is developed that modulate birefringence for at the visible wavelength. From electromagnetic field simulation, the phase difference at 650 nm is calculated to be modulated from 68.5 to 23.5 degree by actuating bimorph beams. The phase difference of fabricated modulator was measured at the wavelength range of from 500 to 800 nm with a driving voltage of 10 V. Phase modulation is obtained, and the maximum variation is -3.3 degree at 646 nm. The maximum drive current is 100 mA.
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