State-of-the-art cryogenic CTE measurements of ultra-low thermal expansion materials

Thomas Middelmann; Alexander Walkov; René Schödel

doi:10.1117/12.2187928

2 September 2015 State-of-the-art cryogenic CTE measurements of ultra-low thermal expansion materials

Thomas Middelmann, Alexander Walkov, René Schödel

Proceedings Volume 9574, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems II; 95740N (2015) https://doi.org/10.1117/12.2187928
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

The accurate characterization of material properties as thermal expansion, temporal length drift and relaxation is essential for semiconductor industry or for aerospace applications. PTB’s absolute length measuring Ultra Precision Interferometer enables investigation of these properties with high accuracy in the temperature range from 7 K to about 300 K. The Coefficient of Thermal Expansion (CTE) can be measured with uncertainties mainly below 3 × 10^-9/K. In this paper we give an overview about the latest state of our experimental setup and evaluation methods. Recent measurement results on silicon carbide ceramics (SiC-100, HB-Cesic), silicon nitride ceramics (SN-PG and SN-Pu) and single crystal silicon (SCS), the latter being the reference material of choice in this regime, are presented.

Citation Download Citation

Thomas Middelmann, Alexander Walkov, and René Schödel "State-of-the-art cryogenic CTE measurements of ultra-low thermal expansion materials", Proc. SPIE 9574, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems II, 95740N (2 September 2015); https://doi.org/10.1117/12.2187928

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available