Investigation of emission properties of vacuum diodes with nanodiamond-graphite emitters

E. S. Gornev; S. N. Orlov; R. K. Yafarov; S. P. Timoshenkov; V. P. Timoshenkov; A. S. Timoshenkov

doi:10.1117/12.2202812

22 December 2015 Investigation of emission properties of vacuum diodes with nanodiamond-graphite emitters

E. S. Gornev, S. N. Orlov, R. K. Yafarov, S. P. Timoshenkov, V. P. Timoshenkov, A. S. Timoshenkov

Proceedings Volume 9668, Micro+Nano Materials, Devices, and Systems; 96682T (2015) https://doi.org/10.1117/12.2202812
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2015, Sydney, New South Wales, Australia

Abstract

The aim of the work was to study the effect of various microelectronic structural and technological implementations to improve the field emission properties of the nano-carbon emitters. The field emission properties of vacuum diodes with nanodiamond-graphite emitters of different geometric shapes was researched. The nanodiamond-graphite layers deposition were carried out from ethanol vapor at low pressure using microwave plasma. Three series of experiments were studied. Researching of emission currents with flat cathodes on silicon wafer coated by nanodiamond-graphite layer were done in first series of experiments. In the second series of experiments, the electrical parameters of integrated field emission diodes with flat nanodiamond-graphite emitters was studied. In the third series of experiments, the electrical parameters of field emission with flat nanodiamond-graphite formed as a micro-sized needles or blades were studied. Vacuum emission studies were done at temperature 300K and pressure 1 × 10^-6 Torr.
Threshold voltage from10-50V per micron and current density about 0.2 A/cm² were obtained in the first series of experiments. In the second and third series of experiments, a threshold voltage from 1 to 10V/ μm and current density of 1.75 A/cm² were displayed. The greatest current density more than 20 A/cm² was obtained using a blade-type emitter.

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E. S. Gornev, S. N. Orlov, R. K. Yafarov, S. P. Timoshenkov, V. P. Timoshenkov, and A. S. Timoshenkov "Investigation of emission properties of vacuum diodes with nanodiamond-graphite emitters", Proc. SPIE 9668, Micro+Nano Materials, Devices, and Systems, 96682T (22 December 2015); https://doi.org/10.1117/12.2202812

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