MEMS-based IR-sources

Sebastian Weise; Bastian Steinbach; Steffen Biermann

doi:10.1117/12.2208410

14 March 2016 MEMS-based IR-sources

Sebastian Weise, Bastian Steinbach, Steffen Biermann

Proceedings Volume 9752, Silicon Photonics XI; 97521E (2016) https://doi.org/10.1117/12.2208410
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

The series JSIR350 sources are MEMS based infrared emitters. These IR sources are characterized by a high radiation output. Thus, they are excellent for NDIR gas analysis and are ideally suited for using with our pyro-electric or thermopile detectors. The MEMS chips used in Micro-Hybrid’s infrared emitters consist of nano-amorphous carbon (NAC). The MEMS chips are produced in the USA. All Micro-Hybrid Emitter are designed and specified to operate up to 850°C. The improvements we have made in the source's packaging enable us to provide IR sources with the best performance on the market. This new technology enables us to seal the housings of infrared radiation sources with soldered infrared filters or windows and thus cause the parts to be impenetrable to gases.

Micro-Hybrid provide various ways of adapting our MEMS based infrared emitter JSIR350 to customer specifications, like specific burn-in parameters/characteristic, different industrial standard housings, producible with customized cap, reflector or pin-out.

Citation Download Citation

Sebastian Weise, Bastian Steinbach, and Steffen Biermann "MEMS-based IR-sources", Proc. SPIE 9752, Silicon Photonics XI, 97521E (14 March 2016); https://doi.org/10.1117/12.2208410

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