Improvement of EUV mix-match overlay for production implementation

Sarohan Park; ByoungHoon Lee; Byong-Seog Lee; Inwhan Lee; Chang-Moon Lim

doi:10.1117/12.2219169

18 March 2016 Improvement of EUV mix-match overlay for production implementation

Sarohan Park, ByoungHoon Lee, Byong-Seog Lee, Inwhan Lee, Chang-Moon Lim

Proceedings Volume 9776, Extreme Ultraviolet (EUV) Lithography VII; 97760E (2016) https://doi.org/10.1117/12.2219169
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

The improvement of overlay control in extreme ultra-violet (EUV) lithography is one of critical issues for successful mass production by using it. Especially it is important to improve the mix and match overlay or matched machine overlay (MMO) between EUV and ArF immersion tool, because EUV process will be applied to specific layers that have more competitive cost edge against ArF immersion multiple patterning with the early mass productivity of EUVL. Therefore it is necessary to consider the EUV overlay target with comparing the overlay specification of double patterning technology (DPT) and spacer patterning technology (SPT). This paper will discuss about required overlay controllability and current performance of EUV, and challenges for future improvement.

Citation Download Citation

Sarohan Park, ByoungHoon Lee, Byong-Seog Lee, Inwhan Lee, and Chang-Moon Lim "Improvement of EUV mix-match overlay for production implementation", Proc. SPIE 9776, Extreme Ultraviolet (EUV) Lithography VII, 97760E (18 March 2016); https://doi.org/10.1117/12.2219169

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available