Wavefront aberrations control for complex optical systems by compensation-surface

Xiaolin Liu; Yanqiu Li; Ke Liu

doi:10.1117/12.2218151

5 November 2015 Wavefront aberrations control for complex optical systems by compensation-surface

Xiaolin Liu, Yanqiu Li, Ke Liu

Proceedings Volume 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015; 97952L (2015) https://doi.org/10.1117/12.2218151
Event: Selected Proceedings of the Photoelectronic Technology Committee Conferences held June-July 2015, 2015, Hefei, Suzhou, and Harbin, China

Abstract

Figure-errors as an optical manufacture error would degrade the performance of optical system. Optical components-clocking around optical axis is a classical method of figure-errors compensation. However, the compensation ability of optical component clocking is limited by the distribution of actual figure-error. This paper proposes a compensation-surface method, which is a simple and effective method for figure-error compensation. Based on the predicted wavefront error with actual figure error, an analytical computational method of figure function of the compensation-surface is built. The figure of compensation-surface is a deterministic polished surface. Finally the other figure errors can be largely compensated by the compensation-surface. The method is implemented on a manufactured optical system, a 193nm small-field projection lens. Simulation experiment proves our method can greatly reduce the aberration caused by figure errors. The WFE can be reduced to 0.04λ (λ=193.29nm) from 0.265λ and reduced by 84%. The compensation effect is more remarkable, and nearly 2.7 times the compensation effect of optical-component clocking method.

Citation Download Citation

Xiaolin Liu, Yanqiu Li, and Ke Liu "Wavefront aberrations control for complex optical systems by compensation-surface", Proc. SPIE 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015, 97952L (5 November 2015); https://doi.org/10.1117/12.2218151

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