Compact high-resolution micro-spectrometer on chip: spectral calibration and first spectrum

Thomas Diard; Florence de la Barrière; Yann Ferrec; Nicolas Guérineau; Sylvain Rommeluère; Etienne Le Coarer; Guillermo Martin

doi:10.1117/12.2223692

25 May 2016 Compact high-resolution micro-spectrometer on chip: spectral calibration and first spectrum

Thomas Diard, Florence de la Barrière, Yann Ferrec, Nicolas Guérineau, Sylvain Rommeluère, Etienne Le Coarer, Guillermo Martin

Author Affiliations +

Proceedings Volume 9836, Micro- and Nanotechnology Sensors, Systems, and Applications VIII; 98362W (2016) https://doi.org/10.1117/12.2223692
Event: SPIE Defense + Security, 2016, Baltimore, MD, United States

Abstract

Compact and hand-held spectrometers may be very interesting for the measurement of spectral signatures of chemicals or objects. To achieve this goal, ONERA and IPAG have developed a new on chip Fourier Transform Spectrometer operating in the visible spectral range with a high spectral resolution (near 2 cm^-1), named visible HR SPOC (visible High Resolution Spectrometer On Chip). It is directly inspired from the MICROSPOC infrared spectrometer, studied at ONERA in the past years. This spectrometer is made of a stair-step two-wave interferometer directly glued on a CMOS detector making it a very compact prototype. After calibrating the optical path difference, measurements of experimental spectra are presented.

Citation Download Citation

Thomas Diard, Florence de la Barrière, Yann Ferrec, Nicolas Guérineau, Sylvain Rommeluère, Etienne Le Coarer, and Guillermo Martin "Compact high-resolution micro-spectrometer on chip: spectral calibration and first spectrum", Proc. SPIE 9836, Micro- and Nanotechnology Sensors, Systems, and Applications VIII, 98362W (25 May 2016); https://doi.org/10.1117/12.2223692

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