Topography measurement of freeform specular surfaces using experimental ray tracing and radial basis functions

A. Alinoori; M. Essameldin; F. Fleischmann; T. Henning

doi:10.1117/12.2237665

11 October 2016 Topography measurement of freeform specular surfaces using experimental ray tracing and radial basis functions

A. Alinoori, M. Essameldin, F. Fleischmann, T. Henning

Author Affiliations +

Proceedings Volume 9961, Reflection, Scattering, and Diffraction from Surfaces V; 99610S (2016) https://doi.org/10.1117/12.2237665
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

Optical deflectometric methods with their inherent potential of high channel capacity with regard to information theory has been of great interest for specular surface topography measurement, where the limited dynamic range needs to be considered in the detection plane. Achieving a final smooth reconstructed surface is the next challenge, because the 2Dintegration methods for the interpolation of the derived data from such sensors are prone to various sources of error such as path dependency, large data sets and secondary reflections. On the other hand, Radial Basis Functions have been studied in this respect for the last years and their characteristics have been widely discussed. In this paper, we introduce our approach for the 3D measurement of specular surfaces by means of Experimental Ray Tracing and Radial Basis Functions integration. We present simulations and discuss the reconstructed surface and the resulting reconstruction error results.

Citation Download Citation

A. Alinoori, M. Essameldin, F. Fleischmann, and T. Henning "Topography measurement of freeform specular surfaces using experimental ray tracing and radial basis functions", Proc. SPIE 9961, Reflection, Scattering, and Diffraction from Surfaces V, 99610S (11 October 2016); https://doi.org/10.1117/12.2237665

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