Wavelength and pulse duration influence on laser 3D nanolithography

Edvinas Skliutas; Danielius Samsonas; Laura Sebestinaitė; Salvijus Ulevicius; Vytautas Jukna; Donatas Narbutis; Mikas Vengris; Mangirdas Malinauskas

doi:10.1117/12.2606034

5 March 2022 Wavelength and pulse duration influence on laser 3D nanolithography

Edvinas Skliutas, Danielius Samsonas, Laura Sebestinaitė, Salvijus Ulevicius, Vytautas Jukna, Donatas Narbutis, Mikas Vengris, Mangirdas Malinauskas

Author Affiliations +

Proceedings Volume PC12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV; PC120120V (2022) https://doi.org/10.1117/12.2606034
Event: SPIE OPTO, 2022, San Francisco, California, United States

Conference Poster

Abstract

Laser 3D nanolithography as an additive manufacturing technology allows the fabrication of various objects at a micro-scale, with possible nano-scale single features. An absorption mechanism plays the key role, thus polymerization reaction starts only at a certain value of light intensity I, which also alters because of possible different non-linearities of light-matter interaction when different wavelengths are used. Both polymerization and optical damage thresholds and the feature size depend on the applied I and energy dose E. In this work, the experiment was performed within the 700-1250 nm wavelength range while varying pulse duration (~ 100-300 fs). We present how the polymerization process (thresholds and feature sizes) depends on both wavelength and pulse duration in the SZ2080TM prepolymer.

Conference Presentation

Citation Download Citation

Edvinas Skliutas, Danielius Samsonas, Laura Sebestinaitė, Salvijus Ulevicius, Vytautas Jukna, Donatas Narbutis, Mikas Vengris, and Mangirdas Malinauskas "Wavelength and pulse duration influence on laser 3D nanolithography", Proc. SPIE PC12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV, PC120120V (5 March 2022); https://doi.org/10.1117/12.2606034

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available