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We demonstrated the 630-nm peak wavelength InGaN-based micro-LED arrays at a high current density up to 50 A/cm2. The device dimension was 17 × 17 µm2. The micro-LEDs obtained a high light output power density of 1.76 mW/mm2 at 50 A/cm2, which is much higher than AlInGaP-based micro-LEDs (20 × 20 µm2). The on-wafer EQE was 0.18%. We also individually fabricated the blue and green micro-LED arrays, the color gamut of RGB micro-LED arrays covered as high as 81.3% of the Rec. 2020 color space in CIE 1931.
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